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Results 1 to 25 of 208

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A novel piezoelectric-based RF BAW filterPENG CONG; REN, Tian-Ling; LIU, Li-Tian et al.Microelectronic engineering. 2003, Vol 66, Num 1-4, pp 779-784, issn 0167-9317, 6 p.Conference Paper

Development and characterization of surface micromachined, out-of-plane hot-wire anemometerCHEN, Jack; CHANG LIU.Journal of microelectromechanical systems. 2003, Vol 12, Num 6, pp 979-988, issn 1057-7157, 10 p.Article

Pulsed laser repair of adhered surface-micromachined polycrystalline silicon cantileversPHINNEY, Leslie M; ROGERS, James W.Journal of adhesion science and technology. 2003, Vol 17, Num 4, pp 603-622, issn 0169-4243, 20 p.Article

Design space of single-loop planar folded micro mechanisms with out-of-plane motionLUSK, Craig P; HOWELL, Larry L.Journal of mechanical design (1990). 2006, Vol 128, Num 5, pp 1092-1100, issn 1050-0472, 9 p.Article

A three-phased circular electrode array for electro-osmotic microfluidic pumpingKONGYING XIE; YONGJUN LAI; XIN GUO et al.Microsystem technologies. 2011, Vol 17, Num 3, pp 367-372, issn 0946-7076, 6 p.Article

Non-uniform residual stresses for parallel assembly of out-of-plane surface-micromachined structuresJOHNSTONE, R. W; SAMEOTO, D; PARAMESWARAN, M et al.Journal of micromechanics and microengineering (Print). 2006, Vol 16, Num 11, issn 0960-1317, N17-N22Article

Fast prototyping of microfluidic devices for separation scienceHOETTGES, K. F; GWILLIAM, R. M; HOMEWOOD, K. P et al.Chromatographia (Wiesbaden). 2001, Vol 53, pp S424-S426, issn 0009-5893, SUPBISConference Paper

Self-sacrificial surface micromachining using poly(methyl methacrylate)JOHNSTONE, R. W; FOULDS, I. G; PARAMESWARAN, M et al.Journal of micromechanics and microengineering (Print). 2008, Vol 18, Num 11, issn 0960-1317, 115012.1-115012.7Article

Electrolyte-based on-demand and disposable microbatteryKI BANG LEE; LIWEI LIN.Journal of microelectromechanical systems. 2003, Vol 12, Num 6, pp 840-847, issn 1057-7157, 8 p.Article

Repulsive-force out-of-plane large stroke translation micro electrostatic actuatorHE, S; MRAD, R. Ben; CHONG, J et al.Journal of micromechanics and microengineering (Print). 2011, Vol 21, Num 7, issn 0960-1317, 075002.1-075002.12Article

MEMS variable capacitance devices utilizing the substrate: II. Zipping varactorsELSHURAFAL, Amro M; EL-MASRY, Ezz I.Journal of micromechanics and microengineering (Print). 2010, Vol 20, Num 4, issn 0960-1317, 045028.1-045028.7Article

A surface micromachining process for suspended RF-MEMS applications using porous siliconDING, Y; LIU, Z; LIU, L et al.Microsystem technologies. 2003, Vol 9, Num 6-7, pp 470-473, issn 0946-7076, 4 p.Article

A boron etch-stop assisted lateral silicon etching process for improved high-aspect-ratio silicon micromachining and its applicationsJERWEI HSIEH; WEILEUN FANG.Journal of micromechanics and microengineering (Print). 2002, Vol 12, Num 5, pp 574-581, issn 0960-1317Article

Decoupled Surface Micromachined Gyroscope With Single-Point SuspensionKULYGIN, Alexander; KIRSCH, Christian; SCHWARZ, Patrick et al.Journal of microelectromechanical systems. 2012, Vol 21, Num 1, pp 206-216, issn 1057-7157, 11 p.Article

Efficient Tools for the Calculation of Drag Forces on Planar Microelectromechanical SystemsCOELHO, Carlos Pinto; SILVEIRA, L. Miguel; WHITE, Jacob et al.Journal of microelectromechanical systems. 2008, Vol 17, Num 3, pp 558-572, issn 1057-7157, 15 p.Article

A Monolithic Polyimide Micro Cryogenic Cooler: Design, Fabrication, and TestYUNDA WANG; LEWIS, Ryan; RADEBAUGH, Ray et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 4, pp 934-943, issn 1057-7157, 10 p.Article

An electrostatic MEMS spring actuator with large stroke and out-of-plane actuationFANGRONG HU; WEIMING WANG; JUN YAO et al.Journal of micromechanics and microengineering (Print). 2011, Vol 21, Num 11, issn 0960-1317, 115029.1-115029.7Article

Wafer level packaging of MEMSESASHI, Masayoshi.Journal of micromechanics and microengineering (Print). 2008, Vol 18, Num 7, issn 0960-1317, 073001.1-073001.13Article

A method to extract the lateral and normal components of motion from the capacitance change of a moving MEMS comb driveVAN SPENGEN, W. Merlijn; HEERES, Erwin C.Journal of micromechanics and microengineering (Print). 2007, Vol 17, Num 3, pp 447-451, issn 0960-1317, 5 p.Article

An effective method to prevent stiction problems using a photoresist sacrificial layerHWANG, Hyun-Suk; SONG, Joon-Tae.Journal of micromechanics and microengineering (Print). 2007, Vol 17, Num 2, pp 245-249, issn 0960-1317, 5 p.Article

Air-damped microresonators with enhanced quality factorLIJIE LI; BROWN, Gordon; UTTAMCHANDANI, Deepak et al.Journal of microelectromechanical systems. 2006, Vol 15, Num 4, pp 822-831, issn 1057-7157, 10 p.Article

Fiber-optical switch using cam-micromotor driven by scratch drive actuatorsKANAMORI, Y; AOKI, Y; SASAKI, M et al.Journal of micromechanics and microengineering (Print). 2005, Vol 15, Num 1, pp 118-123, issn 0960-1317, 6 p.Article

Vertically supported two-directional comb driveKI BANG LEE; LIWEI LIN.Journal of micromechanics and microengineering (Print). 2005, Vol 15, Num 8, pp 1439-1445, issn 0960-1317, 7 p.Article

Surface micromachined membranes for wafer level packagingGALLANT, A. J; WOOD, D.Journal of micromechanics and microengineering (Print). 2005, Vol 15, Num 7, pp S47-S52, issn 0960-1317Conference Paper

Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverageTAS, N. R; SONNENBERG, T; MOLENAAR, R et al.Journal of micromechanics and microengineering (Print). 2003, Vol 13, Num 1, pp N6-N15, issn 0960-1317Article

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